Aluminum Scandium Nitride (Al(1-x)ScxN) Sputtering Targets

Purity---
AlScN (Al:Sc customer-made) AlSc6;AlSc15;AlSc20;AlSc25;AlSc30;AlSc35;AlSc40;AlSc43;AlSc50at％ Purity: 99.5％min~99.9％min

Shape---
Discs, Plate, Step, Rectangle, Sheet

Dimension---
200mm,304mm,334mm diameter , biggest 470mm diameter
thickness>1mm,<50mm

Property---

Application---
Scandium-doped aluminum nitride (AlScN) is widely used in many devices, such as radio frequency filters, piezoelectric actuators, ultrasonic sensors and so on.

Scandium-doped aluminum nitride (Al1-xScxN) is a piezoelectric semiconductor material with high dielectric strength. Scandium-doped aluminum nitride (AlScN) is widely used in many devices, such as radio frequency filters, piezoelectric actuators, ultrasonic sensors and so on. The results show that when Sc content exceeds 30%, ferroelectric switching behavior occurs in high Sc doped AlN films.